PROCESS FOR SYNTHESIZING DIAMOND AND DIAMOND SYNTHESIS APPARATUS

摘要

Disclosed is a process for synthesizing high quality diamond, at high speed, in a gas phase using carbon monoxide and hydrogen gas as starting gases, which comprises adding an oxygen-containing inorganic gas such as CO2 under conditions where graphite is produced unless the oxygen-containing inorganic gas is added. Also, disclosed is a process for consecutively synthesizing diamond on a plurality of substrates, which comprises placing a plurality of substrates in a pre-chamber, moving each of the substrates into a reaction section, synthesizing diamond on the substrate, and then returning the substrate with a diamond film formed thereon to the pre-chamber. An apparatus adapted to practice the synthesis process is further disclosed.