SUBSTRATE PROCESSING APPARATUS,申请号KR20030024350-传众专利搜索

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发明名称	SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号	KR100506495(B1)	申请公布日期	2005.08.04
申请号	KR20030024350	申请日期	2003.04.17
申请人		发明人
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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