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发明名称
ANORDNUNG ELEKTRONISCHER HALBLEITERBAUELEMENTE AUF EINEM TRÄGERSYSTEM ZUR BEHANDLUNG DER HALBLEITERBAUELEMENTE MIT EINEM FLÜSSIGEN MEDIUM
摘要
申请公布号
DE502004003186(D1)
申请公布日期
2007.04.19
申请号
DE200450003186T
申请日期
2004.09.29
申请人
INFINEON TECHNOLOGIES AG
发明人
BRADL, STEPHAN;METZL, MICHAEL;SCHWAIGER, JOSEF;STACHE, THILO
分类号
H01L21/68;H01L21/00;H01L21/673
主分类号
H01L21/68
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代理人
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