| 摘要 |
An apparatus and method for detecting hazes of photomask surface using a white-light scanning interferometer is provided to reduce time for judging the generation of hazes using additional inspection equipment. An apparatus and method for detecting hazes of a photomask surface using a white-light scanning interferometer comprises a laser(10), a beam forming telescope(13), a homogenizer(14), a focus optical system(15), an energy detector(18), a haze detector(30), and a microscope(20). The laser emits the beam of large output. The beam forming telescope decides the form of the beam. The homogenizer forms the intensity of beam with uniformed energy distribution. The focus optical system makes the beam focused, and decides the size of beam. The energy detector measures in real time the intensity of energy of the beam reached at the photomask using a beam splitter. The haze detector is operated by a white-light scanning interferometer which detects in real time the generation of hazes. The microscope controls the change of the photomask surface and the position of the hazes generated.
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