Method for adjusting sizes and shapes of plug openings

摘要

The invention is directed to a method for adjusting sizes and shapes of plug openings for border plug openings overlapping with trenches respectively, wherein the border plug openings are separated from each other with a distance equal to or smaller than a specific distance. The method comprises performing an adjusting process for separating the border plug openings away from each other and enlarging the dimensions of the border plug openings so that the border plug openings are located within the trenches respectively and the edges of the borer openings are separated from the sidewalks of the trenches, wherein the border plug openings are enlarged within ranges of the trenches respectively.