| 摘要 |
PURPOSE:To functionally perform precise guiding extending over a long time and attain light weight construction by constituting the whole body out of a ceramic molded body, and forming a Y stage or a X-Y stage out of a hollow member into one body. CONSTITUTION:The under surface plate (Y stage) 10 of a X-Y stage is formed out of a molding sintered body in one body of Si3N4 in which ribs 2 are provided in the hollow space 1, and the under surface plate 10 of S-Y stage is obtained by forming a V-groove 3 through grinding work on this surface plate 10, hereafter, lapping the groove 3 so as to have surface roughness about under 0.8S. In this way, the whole body is formed out of ceramic of light weight compared with metals, further at least, the Y stage or the X-Y stage is constituted out of a a hollow member molded in one body, hereby, an ideal light weight X-Y stage which has sufficiently satisfactory property as to low thermal expansion coefficient, high wear resistance, high rigidity, and non-magnetism is obtained. |
