| 摘要 |
According to an embodiment of the present invention, disclosed is an image pickup device. The image pickup device of the present invention includes: a photoelectric conversion part; a transmission transistor connected to the photoelectric conversion part; a floating diffusion connected to the transmission transistor; an amplification transistor which is connected to the floating diffusion, and has a gate area; and a wire connected to the gate area. The gate area includes a gate terminal and a silicide layer. The silicide layer is arranged above the gate port, and a first film is arranged on a lateral side of the gate terminal when viewed from a cross section, and a second film is arranged on the gate terminal and the first film, and the first film is selected among an oxide film and a nitride film, and the second film is selected from the nitride film and an oxynitride film. The image pickup device of the present invention can suppress degradation of an SN ratio by suppressing increase in non-uniformity of 1/f noise, and can obtain sufficient image quality. |
