发明名称 |
Wien filter and electron microscope using same |
摘要 |
A Wien filter is provided in which a reduced amount of secondary aberration is produced. This filter has 12 poles (P1-P12). These poles have front ends (P'1-P'12) facing the optical axis. These front ends have a 12-fold rotational symmetry about the optical axis (O) within the XY-plane perpendicular to the optical axis. <IMAGE> |
申请公布号 |
EP1335402(B1) |
申请公布日期 |
2016.07.06 |
申请号 |
EP20030250799 |
申请日期 |
2003.02.07 |
申请人 |
JEOL LTD. |
发明人 |
LOPEZ, MARTINEZ G.;TSUNO, KATSUSHIGE |
分类号 |
H01J37/05;H01J37/26 |
主分类号 |
H01J37/05 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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