发明名称 BARRIER FILM FORMATION DEVICE AND BARRIER FILM FORMATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a barrier film formation device and a barrier film formation method that can form a homogeneous barrier film over the entire region of an inner peripheral surface of a container body having a large-diameter part and a small-diameter part provided successively in a container axial direction.SOLUTION: The present invention relates to a barrier film formation device 10 that forms a barrier film on an inner peripheral surface 200a of a container body 200 having a large-diameter part 202 and a small-diameter part 201 provided successively in a container axial direction, the barrier film formation device comprising a cylindrical external electrode 20 having the container body 200 arranged inside, and a cylindrical dielectric member 30 arranged inside the external electrode 20 and surrounding the container body 200 radially from outside. A thick part, surrounding a small-diameter part 201 radially from outside, of the dielectric member 30 is larger in thickness in a radial direction than a thin part surrounding the large-diameter part 202 radially from outside, and a swell part swelling radially toward inside is formed on an inner peripheral surface 20a of the external electrode 20 at a part where the thin part of the dielectric member 30 is located.SELECTED DRAWING: Figure 1
申请公布号 JP2016156083(A) 申请公布日期 2016.09.01
申请号 JP20150036614 申请日期 2015.02.26
申请人 YOSHINO KOGYOSHO CO LTD 发明人 TATENO TAKANORI;HOSAKA KOJI
分类号 C23C16/505;B65D1/00;B65D1/02;B65D23/02 主分类号 C23C16/505
代理机构 代理人
主权项
地址