| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic component conveyance device and an electronic component inspection device that have excellent cooling responsibility to a contacting member.SOLUTION: An electronic component inspection device 1 includes: a plurality of heads 3 contacting with an electronic component; a supply flow passage 10A supplying a refrigerant RF to the heads 3; and a recovery flow passage 10B recovering the refrigerant RF from the heads 3. The supply flow passage 10A has a first supply flow passage 47 connected to a refrigerant source 28 and a supply flexible tube 5A serving as a second supply flow passage 53A branching from the first supply flow passage 47 and extending to the heads 3. The recovery flow passage 10B, on the other hand, has a first recovery flow passage 48 connected to the refrigerant source 28 and a recovery flexible tube 5B serving as a second recovery flow passage 53B branching from the first recovery flow passage 48 and extending to the heads 3.SELECTED DRAWING: Figure 5 |
