| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect irregularity of an inspected object.SOLUTION: A surface normal vector of a measurement point T in a measurement region of an inspected object is calculated based on image data picked up by a camera, and an index value corresponding to a standard point M1 is calculated by carrying out an inner product of the surface normal vector of the measurement point T coinciding with a calculation point IP by making the calculation point of the index value setting filter FR determining the standard point M1 corresponding to the calculation point IP showing the position to carry out the inner product of the surface normal vector and the calculation point IP conform to the measurement point T in the measurement region L. At this time, the index value corresponding to each coordinate of the measurement region L is specified by changing the measurement point T to which the calculation point IP of the index value setting filter FR is conformed and calculating the index value corresponding to the standard point M1 for every change, and an irregularity position of the detected body is detected by specifying the coordinate corresponding to the index value out of the standard range in the measurement region L.SELECTED DRAWING: Figure 10 |
