发明名称 EMBEDDED GRAPHITE HEAT SPREADER FOR 3DIC
摘要 A device with thermal control is presented. In some embodiments, the device includes a plurality of die positioned in a stack, each die including a chip, interconnects through a thickness of the chip, metal features of electrically conductive composition connected to the interconnects on a bottom side of the chip, and adhesive or underfill layer on the bottom side of the chip. At least one thermally conducting layer, which can be a pyrolytic graphite layer, a layer formed of carbon nanotubes, or a graphene layer, is coupled between a top side of one of the plurality of die and a bottom side of an adjoining die in the stack. A heat sink can be coupled to the thermally conducting layer.
申请公布号 WO2016141217(A1) 申请公布日期 2016.09.09
申请号 WO2016US20746 申请日期 2016.03.03
申请人 INVENSAS CORPORATION 发明人 UZOH, Cyprian, Emeka;WANG, Liang;GAO, Guilian;WOYCHIK, Charles, G.
分类号 H01L25/065;F28F21/02;H01L23/00;H01L23/36;H01L23/373 主分类号 H01L25/065
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