| 摘要 |
PURPOSE:To control a polishing tool faithfully to a locus data of a reference workpiece by providing a means in which a difference between reaction force, detected by a force sensor when the rotary polishing tool is moved to a locus data start point for the actual workpiece, and reaction force, stored in a reaction force memory means, is calculated with a position correction amount calculated from this difference. CONSTITUTION:Being based on a locus data of a reference workpiece stored in a locus data memory means 22a, when a polishing tool 15 is moved toward a start point of the locus data, the polishing tool 15 is brought into contact with the actual workpiece to deflect a spring, and by detecting reaction force received from the actual workpiece by a force sensor 14, a position correction amount is calculated by a position correction amount arithmetic means 23a from a difference from reaction force in the reference workpiece. Being based on a arithmetic value of this means 23a, the locus data of the reference workpiece, stored in the locus data memory means 22a, is corrected by a correcting means 20a. By this corrected locus data, a tool drive control means 20b controls a locus of the tool to perform work for the actual workpiece. |
