| 摘要 |
PURPOSE:To obtain the small-sized, inexpensive sensor which is easily handled and has superior characteristics by forming a 1st and a 2nd titanium nitride film on an electrode support base material, using the 1st titanium nitride film as a potential detection electrode, and covering the 2nd titanium nitride film with an organic high polymer film and using it as a reference electrode. CONSTITUTION:On an insulating substrate (electrode support base material) 2, the 1st titanium nitride film 3 and 2nd titanium nitride film 4 are provided successively. On the insulating substrate 2, an insulating film 5 is further formed and the titanium films 3 and 4 are coated except an H<+> selection electrode part 3a, a reference electrode part 4a, and connection parts 3b and 4b. The high polymer film 6 is formed on the reference electrode part 4a. Then this sensor 1 is mounted directly on a connector (c) and connected to a measuring circuit. Consequently, the structure is simplified and the manufacture process is facilitated to facilitate size reduction, cost reduction, and mass-production. Further, variance in characteristics among sensors is reduced because of the simple structure. |
