发明名称 GAS LASER DEVICE
摘要 PURPOSE:To enable long range laser oscillation whose output is stabilized by controlling a gas pressure so that the oscillation efficiency of laser may be maximized all the time even when an attempt is made to change charging voltage in order to maintain constant output. CONSTITUTION:An optical detector 5 monitors the intensity of laser output light while a central processing unit(CPU) 6 compares an electrical signal transited from the optical detector 5 with a preset output value and instruct a high voltage power supply unit 7 so that charging voltage may be increased until the deviation may be eliminated. The CPU 6 repeats control actions of a rise in a small amount of pressure and arithmetic operation of efficiency. At every control action and arithmetic operation, the CPU makes comparison with the result of the previous operation one by one and halts the pressure rise control action when the deviation enters a dead time range. This construction makes it possible to maintain a discharge state where the oscillation efficiency constantly indicates the maximum value when the discharge is unstable even if an attempt is made to change the charging voltage.
申请公布号 JPH03166783(A) 申请公布日期 1991.07.18
申请号 JP19890304584 申请日期 1989.11.27
申请人 NIKON CORP 发明人 KAWAMURA SHINICHIRO
分类号 H01S3/104;H01S3/036;H01S3/134 主分类号 H01S3/104
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