Verwendung von Cellulosepropionat-3-morpholinobutyraten zur Herstellung von strahlungsempfindlichen Photoresistschichten

摘要

It has been discovered that coatings of cellulose propionate 3-morpholinobutyrate are sensitive to heat and light, such sensitive being illustrated by the insolubilization of the polymer that occurs upon exposure to such energy. Such coatings are useful as radiation-sensitive photoresists.