| 摘要 |
PURPOSE:To easily manufacture a heating body and make it difficult to crack by making a composite material of a structure such as ceramic fiber or the like and a silicon carbide matrix. CONSTITUTION:Silicon carbide is deposited by CVD method around fiber or the like of an assembly composed of ceramic fiber or whiskers to make the ceramic fiber or the like rigid. Since the silicon carbide can be highly pure by raising purity of gas in an Si source and a C source at this time, a body with specific electrical resistance of 10<4>OMEGA-cm or higher can be obtained. Thus even if microwaves with frequency and power for domestic use are radiated, the heating body absorbs the microwaves without discharge, is self-heated to at least 100 deg.C or higher, has sufficient resistance against a thermal impact caused by splash contact of water, etc., and is not easy to crack in usual dealing. |
