| 摘要 |
<p>PURPOSE:To accelerate the generation of plotting data by storing the conversion results of all patterns comprising a design pattern by a line segment data bit string conversion means, and outputting bit string data as the plotting data. CONSTITUTION:The line segment data of plural patterns comprising the design pattern with the line segment data bit string conversion means 1 is converted to the bit string data expressed in a micro area in an area enclosed with those line segment data, and the conversion results of all patterns comprising the design pattern area stored in one storage area of a bit string storage means 2 as the bit string data. An output means 3 outputs the bit string data stored in the bit string storage means 2 as the plotting data. Thereby, the superposition of plural patterns comprising the design pattern can be easily eliminated without performing a graphic logical operation, and the generation of the plotting data can be accelerated without being affected by the scale of an IC mask pattern.</p> |
