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发明名称
METALLIZATION PROCESS
摘要
申请公布号
US3558352(A)
申请公布日期
1971.01.26
申请号
USD3558352
申请日期
1966.10.27
申请人
INTERNATIONAL BUSINESS MACHINES CORP.
发明人
PAUL P. CASTRUCCI;DAVID DE WITT;WALTER E. MUTTER;VIR A. DHAKA
分类号
H01L21/00;H01L21/331;H01L23/485;H01L29/00;(IPC1-7):H01L1/14;H01L5/02
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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