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发明名称
PROCESSING EQUIPMENT
摘要
申请公布号
JPH03188631(A)
申请公布日期
1991.08.16
申请号
JP19890327594
申请日期
1989.12.18
申请人
TOKYO ELECTRON LTD
发明人
IBUKA NARUHITO
分类号
B65G49/07;H01L21/304;H01L21/324
主分类号
B65G49/07
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