| 摘要 |
PURPOSE:To improve the operability and economical efficiency of the laser beam machine by regulating a region where necessary laser beam machining is performed to the small-sized chamber inside and fitting a laser beam transmission wall freely attachably and detachably airtightly on the laser beam machine. CONSTITUTION:In the laser beam machine 5 provided with an X Y table 2 on which a small-sized airtight chamber 9 is loaded, a drive controller thereof, small-sized airtight chamber 9 evacuating vacuum pumps 10a and 10b, an internal pressure monitor 11 thereof, a laser beam oscillator 5 and an optical unit 6 to guide and project a laser beam on the machining region, the laser beam transmission wall is formed freely attachably and detachably airtightly. By this method, the machine is simplified and its operability is improved and the economical efficiency can be improved by effective application of inert gas. |
