摘要 |
PURPOSE:To prevent the camber of the sintered body and to prevent the peeling, increase in resistance, etc., of a metallized layer by forming patterns of a high melting metal on an aluminum nitride molding contg. a binder, then heating and degreasing the molding under specific conditions, then sintering the molding by heating. CONSTITUTION:The aluminum nitride molding (A) contg. (b) an org. binder is obtd. by compounding (a) 100 pts.wt. aluminum nitride powder, (b) 0.1 to 30 pts.wt. org. binder and (c) 0.01 to 10 pts.wt. sintering assistant, etc., and molding the mixture. Separately, a paste (B) is obtd. by mixing (d) the powder of the high melting metal preferably, such as W and Mo, (e) an org. binder and (f) an org. solvent. After the patterns of the B component are formed on the surface of the A component, the molding is degreased by heating to 700 to 900 deg.C in a reducing gaseous atmosphere humidified to 1 to 100mmHg steam pressure and is then sintered by heating, by which the above sintered body is obtd. |