METHOD AND DEVICE FOR REGULATING VERTICAL INCIDENCE OF CHARGED PARTICLE RAY,申请号JP19780063739-传众专利搜索

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发明名称	METHOD AND DEVICE FOR REGULATING VERTICAL INCIDENCE OF CHARGED PARTICLE RAY
摘要
申请公布号	JPS54155400(A)	申请公布日期	1979.12.07
申请号	JP19780063739	申请日期	1978.05.27
申请人	AKASHI SEISAKUSHO KK	发明人	UEDA KOUJI
分类号	G21K1/093;G21K1/08;H01L21/027	主分类号	G21K1/093
代理机构		代理人
主权项
地址

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