| 摘要 |
PURPOSE:To improve the dimensional accuracy of diffusion holes by forming spiral spacers of projecting materials consisting of a hardening material and heat resistant fine particles having prescribed grain shapes and tightly fixing a solid electrolyte plate and a sealing plate via a film body consisting of a hardening material. CONSTITUTION:Oxygen passes the diffusion holes and diffuses to an electrode film 2 when the diffusion holes are formed of the spiral space enclosed of the opposite partition wall surfaces of the spiral spacers 5, the solid electrolyte plate 1 and the sealing plate 6. On the other hand, the spacers 5 are the projecting bodies 5a consisting of the mixture composed of the hardening material and the heat resistant fine particles having the prescribed grain sizes and tightly fix the electrolyte plate 1 and the sealing plate 6; therefore, the accuracy of the size of the diffusion holes between both is improved and the resistance to the misregistration of the joining between both is obtd. The yield of production is thus improved. In addition, the parts 7, 9 of the film body 5 facing the electrode film 2 and an inflow port 8 of the flow passage of the diffusion hole are formed as gaps and, therefore, the degradation in the activity of the electrode film 2 and closing of the inlet 8 which are accidentally generated by the hardening material are prevented and the yield of production is improved. Since the diffusion holes can be formed large, the fluctuation in the threshold current value is decreased. |
