| 摘要 |
<p>PURPOSE: To provide an excellent linearity with variety of gases over a wide range of flow rate, by constituting a flow dividing device with a surface which forms radius direction fluid channel, a flow divider, and a member for fixing the flow divider. CONSTITUTION: This flow meter comprises a housing 12 which is provided with an axis direction channel 14. A standstill sleeve 60 is detachably fixed to the axis direction channel 14, and a longitudinal direction flow channel extends while penetrating the sleeve 60. On the fluid channel, a flow divider 70 is assigned while position adjustment is allowed. Between the inside surface of sleeve 60 and the flow divider 70, an annular gap is formed, so that the flow in the fluid channel is kept as a laminar flow. A fixing member 74 is adjustable, and, by changing relative position of the flow divider 70 in the inside of sleeve 60, a flow rate of fluid can be changed. During use of the flow meter, the flow divider 70 does not move, depending on pressure or frictional force caused by flow of the fluid.</p> |
