发明名称 MEASURING APPARATUS OF JITTER OF POLYGON SCANNER
摘要 PURPOSE:To reduce noises due to the fluctuation of the air by providing wind protecting pipes in a manner allowing three optical axes from a light source to a polygon scanner and an ftheta lens to prism mirrors 5a, 5b to pass therethrough. CONSTITUTION:A light beam L1 generated from a light source 1 is, after passing through a pipe 2a, reflected by a polygon scanner 3. Reflecting lights L2, L3 pass through an ftheta lens 4 and pipes 2b, 2c to be reflected by prism mirrors 5a, 5b and incident upon sensors 6a, 6b; 6c, 6d for a required time, respectively. The time interval from when the powers measured by the sensors 6a, 6b are equal to each other to when the powers measured by the sensors 6c, 6d become equal to each other is measured, so that jitters are calculated. Since there are plastic or metallic pipes 2a-2c in this apparatus, noises of a measured value due to the fluctuation of the air are reduced. If the pipes 2a-2c have wave-like inner shapes in the longitudinal direction, the irregular reflection of the light beam within the pipes 2a-2c can be prevented.
申请公布号 JPH03220439(A) 申请公布日期 1991.09.27
申请号 JP19900013634 申请日期 1990.01.25
申请人 COPAL ELECTRON CO LTD 发明人 WAKASHIMA RIE;TASHIRO KATSU;NAKAYOSHI HIROSHI;SUGIZAKI IWAO
分类号 G01M11/00;G02B26/10;G02B26/12 主分类号 G01M11/00
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