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发明名称
VERFAHREN ZUM HERSTELLEN VON HOCHINTEGRIERTEN KOMPLEMENTAEREN MOS-FELDEFFEKTTRANSISTORSCHALTUNGEN IN SILIZIUMGATE-TECHNOLOGIE
摘要
申请公布号
DE3133468(A1)
申请公布日期
1983.03.17
申请号
DE19813133468
申请日期
1981.08.25
申请人
SIEMENS AG
发明人
SCHWABE,ULRICH,DR.-PHIL.;JACOBS,ERWIN,DIPL.-PHYS.DR.RER.NAT.;SCHEIBE,ADOLF,DIPL.-PHYS.DR.-ING.
分类号
H01L27/092;H01L21/265;H01L21/8238;H01L27/06;H01L29/78;(IPC1-7):H01L21/72;H01L21/26
主分类号
H01L27/092
代理机构
代理人
主权项
地址
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