| 摘要 |
<p>PURPOSE:To retain the product gas returned to an adsorption vessel from a product tank in the adsorption vessel for a long period and to obtain the corresponding improvement of adsorption efficiency by providing returning flow valves which are opened when the adsorption vessel is pressurized and return the product gas in the product tank through plural pipings into the adsorption vessel through plural position of the adsorption vessel, to plural pipings. CONSTITUTION:Plural pipings are provided which connect the adsorption vessels 1, 2 with the product tank 20, and the returning flow valves 8, 9, 18, 19 are provided in plural pipings which are opened when the adsorption vessels 1, 2 are pressurized and return the product gas in the product tank 20 through plural pipings into the adsorption vessels 1, 2 through plural positions of the adsorption vessels 1, 2. By this method, the product gas in the product tank 20 is simultaneously returned to the adsorption vessels 1, 2 through plural pipings, and the product gas is supplied into all over the inner area of the adsorption vessels 1, 2 so that the passing time of gas in the adsorption vessels 1, 2 is elongated and the product gas of high purity is obtained.</p> |
