LIQUID PHASE EPITAXY APPARATUS

摘要

A sliding boat liquid phase epitaxy apparatus comprises a base 1, substrate support means 2 disposed on the base 1 and fixed in a horizontal sense with respect to the base 1, and a slidable well member 3 abutting and disposed above the substrate support means 2, and having at least one well 17 capable of holding growth solution 21. A significant problem in growth of layers by liquid phase epitaxy when using a sliding boat apparatus is to achieve sufficiently good wipe-off so as to produce a layer having a smooth surface. This apparatus uses substrate support means 2 comprising a block 6 provided with a flat-bottomed recess 7 in part of the top surface of the block 6 between the ends of the block 6, and a plate 8 fitting into the recess 7 so that the top surface of the plate 8 is level with the top surface of the block 6 outside the recess 7, which plate 8 is provided with an aperture 9 capable of containing a substrate 20 on which an epitaxial layer is to be grown and can be disposed under the well 17. The plate 3 and well member 3 are made of different materials.