| 摘要 |
PURPOSE:To effectively remove dust particles by applying an impact simultaneously upon vibration to isolate the particles in the cavity of an electronic component and blowing ionized air. CONSTITUTION:With an opening disposed downside an electronic component 1 is secured to a sample attaching jig 2, a vibration is applied by a vibration generator 4 having an acceleration sensor 3 to isolate dust particles in the cavity of the component, and an impact is simultaneously applied by an impact applying machine 5. The isolated particles are attached to the inner wall of the cavity by means of static electricity, but ionized air is blown by an ionization air blower 7 through an air filter 6 to suck and exhaust floated particles together with air to an exhaust duct 8. Thus, the particles are effectively removed without influence of the static electricity. |
