| 摘要 |
PURPOSE:To easily manufacture a high-speed ion current recording head at low cost by a method wherein a second electrode is divided into 2A and 2B flat electrodes, and a first electrode, a first insulating layer and the 2A electrode, and the 2B electrode, a second insulating layer and a third electrode are respectively formed into one body, and then the 2A and 2B electrodes are bonded together. CONSTITUTION:Each material 30A, 30B is prepared by forming a methallic thin film on both side surfaces of an insulative sheet of polyimide resin or the like. A first electrode 11 and a 2A electrode 12A are formed on both metallic thin films of the material 30A, and also a 2B electrode 12B and a third electrode 13 are formed on both metallic thin films of the material 30B, through photoetching. If a laser light is projected to the half-processed materials 30A, 30B from the side of the 2A electrode 12A and 2B electrode 12B, holes of the same diameter as the holes formed in the 2A electrode 12A and 2B electrode 12B are opened in the insulative sheet. When the resultant first and second members A and B are integrally bonded by an adhesive, an ion current controlling body 10 is easily obtained. |
