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发明名称
CHEMICAL SUCK-BACK MECHANISM OF CHEMICAL COATING APPARATUS
摘要
申请公布号
JPH02151018(A)
申请公布日期
1990.06.11
申请号
JP19880305221
申请日期
1988.12.01
申请人
NEC CORP
发明人
IWAMI SATOSHI
分类号
G03F7/16;B05C11/08;H01L21/027
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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