| 摘要 |
PURPOSE:To attain the rapid positioning of two objects having light transparency to a prescribed positional relation with high accuracy by respectively picking up the images of two pieces each of the mark parts of the two objects having the light transparency and determining the deviation quantity and deviation direction between the marks. CONSTITUTION:The two objects 11, 12 having the light transparency are roughly positioned in the desired positional relation by corresponding transporting mechanisms or rough positioning mechanisms. The images of the mark x1, x2, y1, y2 parts for positioning of the roughly positioned objects are picked up by two units of image pickup devices. The deviation quantity and direction between the respective positioning marks x1, x2, y1, y2 are determined from the image data obtd. in such a manner and the two objects 11, 12 are moved in the directions of X, Y and theta until the deviation quantity is decreased to zero. Thus, the two objects 11, 12 having the light transparency are rapidly disposed to face each other in the desired positional relation with the high accuracy. |
