| 摘要 |
PURPOSE:To extend gas life by providing it with a gas circulation mechanism, inside a laser chamber, a heat exchanger for gas cooling, at the gas flow outlet of a discharge electrode, and a heat exchanger for gas heating, at the gas flow inlet of the discharge electrode. CONSTITUTION:Cooling water is let flow to a heat exchanger 62 for gas cooling to cool the leser gas, and also cooling water is let flow to a pipe 9 for chamber cooling to cool the chamber, whereby the reaction between halogen gas and the structure of the laser chamber is suppressed, and also gas deterioration during discharge is prevented, and the life of leser gas is extended. On the other hand, a crossflow fan 7 long in axis is arranged in parallel with the discharge electrode 2, and this and the fan casing 8 are combined to rotate the crossflow fan, whereby high-speed gas flow occurs in the discharge electrode 2. At this time, a heat exchanger 61 for gas heating is installed at the inflow port to electrode 2 of gas, and by letting hot water flow in the pipe of this heat exchanger 61 for gas heating, the temperature of the laser gas in the electrode 2 can be raised to a proper temperature. |
