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发明名称
ALN SUBSTRATE
摘要
申请公布号
JPH04218950(A)
申请公布日期
1992.08.10
申请号
JP19910079772
申请日期
1991.04.12
申请人
TOSHIBA CORP
发明人
YASUMOTO YASUAKI;YAMAKAWA KOJI;IYOGI YASUSHI;KOIWA KAORU;IWASE NOBUO
分类号
H01L23/12;H05K1/03;H05K1/05;H05K1/09;H05K3/38
主分类号
H01L23/12
代理机构
代理人
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地址
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