发明名称 DETERMINATION OF REFRACTIVE INDEX AND THICKNESS OF THIN LAYERS
摘要 The refractive index and thickness of ultrathin layers<1 mu m in thickness are determined by recording the layers, which have been applied to a solid support, by surface plasmon microscopy as a function of the angle of incidence of the incident laser beam, the method making it possible to determine layer thicknesses with a vertical resolution>/=0.1 nm and a simultaneous lateral resolution>/=5 mu m.
申请公布号 US5237392(A) 申请公布日期 1993.08.17
申请号 US19920928083 申请日期 1992.08.13
申请人 BASF AKTIENGESELLSCHAFT 发明人 HICKEL, WERNER;KNOLL, WOLFGANG
分类号 G01B11/06 主分类号 G01B11/06
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