发明名称 |
Capacitive acceleration sensor with free diaphragm |
摘要 |
The acceleration sensor has a first stationary substrate (1) having a stationary electrode (17u) and a second stationary substrate (2) having another stationary electrode (30 l ) and being opposed to the first stationary substrate (1) with a given spacing. An electrically conductive diaphragm (3) is disposed in the spacing and has a central segment (26) fixed in the spacing through the pair of stationary substrates (1, 2) and a peripheral segment (25m) surrounding around and extending resiliently from the central segment (26) to undergo displacement in the spacing relative to the stationary electrodes (17u, 30 l ) in response to an external acceleration force. The peripheral segment (25m) and the opposed stationary electrodes (17u, 30 l ) form variable capacitors effective to produce a capacitance change in response to the displacement of the peripheral segment (25m) to detect the external acceleration force. <IMAGE> |
申请公布号 |
US5253526(A) |
申请公布日期 |
1993.10.19 |
申请号 |
US19910704221 |
申请日期 |
1991.05.22 |
申请人 |
COPAL COMPANY LIMITED |
发明人 |
OMURA, ATSUSHI;TAKAGI, MASAAKI;NAKAMURA, SHIGEKAZU |
分类号 |
G01P15/125;G01P15/18;(IPC1-7):G01P15/125 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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