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发明名称
METHOD FOR PRODUCING MASK PATTERN
摘要
申请公布号
RU1314881(C)
申请公布日期
1993.11.15
申请号
SU19853836518
申请日期
1985.01.02
申请人
BERLIN E.V.;KRASNOZHON A.I.;CHERNYSHOV A.I.
发明人
BERLIN E.V.;KRASNOZHON A.I.;CHERNYSHOV A.I.
分类号
H01L21/312;G03F1/80;(IPC1-7):H01L21/312;G03F1/00
主分类号
H01L21/312
代理机构
代理人
主权项
地址
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