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发明名称
摘要
申请公布号
JPH0612792(B2)
申请公布日期
1994.02.16
申请号
JP19870055716
申请日期
1987.03.10
申请人
NIPPON ELECTRIC CO
发明人
TSUNENARI KINJI;HAMANO KUNYUKI
分类号
H01L23/522;H01L21/768;(IPC1-7):H01L21/90
主分类号
H01L23/522
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