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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH0661230(A)
申请公布日期
1994.03.04
申请号
JP19920136452
申请日期
1992.05.28
申请人
NEC CORP
发明人
YAMAWAKI MASAHIRO
分类号
H01L21/3205;H01L23/52;(IPC1-7):H01L21/320
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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