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发明名称
SEMICONDUCTOR MANUFACTURING METHOD AND APPARATUS
摘要
申请公布号
JPH09181046(A)
申请公布日期
1997.07.11
申请号
JP19950333719
申请日期
1995.12.21
申请人
HITACHI LTD
发明人
ISHIDA YASUNOBU
分类号
C23C14/00;C23C14/35;C23C16/50;C23C16/511;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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