APPARATUS FOR OXIDATION AND METHOD FOR OXIDATION,申请号KR19950008717-传众专利搜索

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发明名称	APPARATUS FOR OXIDATION AND METHOD FOR OXIDATION
摘要
申请公布号	KR0165383(B1)	申请公布日期	1999.02.01
申请号	KR19950008717	申请日期	1995.04.13
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	HWANG, INN-CHUL;PARK, JUNG-KYU
分类号	H01L21/316;(IPC1-7):H01L21/316	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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