发明名称 PIEZOELECTRIC/ELECTROSTRICTIVE DEVICE AND ITS MANUFACTURING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a piezoelectric/electrostrictive device capable of obtaining a large deflection angle without the enlargement of an element, and of preventing deterioration of a driving part with time. SOLUTION: This piezoelectric/electrostrictive device 10 is equipped with a base part 11, a thin plate shape deformed part 12 constituting a flat face extended from the base part, a piezoelectric/electrostrictive element 14 brought into close contact with the deformed part, and a reflection part 13 extended from the deformed part so as to constitute a flat working face 13a which intersects with the flat face of the deformed part, and arranging a light reflection member 13b on the working face. The light reflection angle of the reflection part changes due to the deformed part being deformed in the roughly orthogonal direction to the flat face of the deformed part by the action of the piezoelectric/ electrostrictive element. Accordingly, it is not necessary to make the reflection part large, even when the length of the deformed part is made large for making the light reflection angle large. Also, the flatness of the light reflection face is maintained for a long period of time since the reflection part is formed with high rigidity.</p>
申请公布号 JP2002328319(A) 申请公布日期 2002.11.15
申请号 JP20020053993 申请日期 2002.02.28
申请人 NGK INSULATORS LTD 发明人 TAKEUCHI YUKIHISA;NANATAKI TSUTOMU;KIMURA KOJI
分类号 G02B26/08;G02F1/19;H01L41/09;H01L41/187;H01L41/22;H01L41/313;H01L41/335;H01L41/338 主分类号 G02B26/08
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