发明名称 Method and apparatus for wafer level testing of integrated optical waveguide circuits
摘要 A method of testing a planar lightwave circuit is achieved by coupling an optical probe to the planar lightwave circuit. In one embodiment, a second probe is used in combination with the first probe to test the planar lightwave circuit by sending and receiving a light beam through the planar lightwave circuit.
申请公布号 US6859587(B2) 申请公布日期 2005.02.22
申请号 US20010041038 申请日期 2001.12.28
申请人 INTEL CORPORATION 发明人 NIKONOV DMITRI E.;MCCORMACK MARK T.
分类号 G01M11/00;(IPC1-7):G02B6/30 主分类号 G01M11/00
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