摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light irradiation device 1 of which the defects can be precisely detected even if a light irradiation surface W is not in a state of a mirror surface but in a rugged half-mirror state. <P>SOLUTION: The light irradiation device comprises a casing 3 having inspection holes 2 penetrating therethrough, and an LED row R of a plurality of LEDs 4 arranged in a row along the inner periphery of the inspection hole 2. The light irradiation surface W in a state of a mirror surface or half-mirror surface arranged at the bottom surface of the inspection hole 2 is irradiated by light emitted from the LEDs 4. The LEDs 4 are arranged so that light axes of the respective LEDs 4 do not cross the light irradiation surface W, and it is constructed so that light spreading in an angle wider than a prescribed angle from the light axis of the LEDs 4 is not directed toward the light irradiation surface W. <P>COPYRIGHT: (C)2005,JPO&NCIPI |