发明名称 LIGHT IRRADIATION DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a light irradiation device 1 of which the defects can be precisely detected even if a light irradiation surface W is not in a state of a mirror surface but in a rugged half-mirror state. <P>SOLUTION: The light irradiation device comprises a casing 3 having inspection holes 2 penetrating therethrough, and an LED row R of a plurality of LEDs 4 arranged in a row along the inner periphery of the inspection hole 2. The light irradiation surface W in a state of a mirror surface or half-mirror surface arranged at the bottom surface of the inspection hole 2 is irradiated by light emitted from the LEDs 4. The LEDs 4 are arranged so that light axes of the respective LEDs 4 do not cross the light irradiation surface W, and it is constructed so that light spreading in an angle wider than a prescribed angle from the light axis of the LEDs 4 is not directed toward the light irradiation surface W. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005050676(A) 申请公布日期 2005.02.24
申请号 JP20030281387 申请日期 2003.07.28
申请人 CCS INC 发明人 YONEDA KENJI;MASUMURA SHIGEKI
分类号 G02B27/00;F21S2/00;F21S8/04;F21W131/40;F21Y101/02;H01L33/00 主分类号 G02B27/00
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