发明名称 LITHIUM NIOBATE PIEZOELECTRIC SINGLE CRYSTAL, AND PIEZOELECTRIC VIBRATOR AND PIEZOELECTRIC VIBRATION GYROSCOPE USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a piezoelectric single crystal hardly affected by the supporting structure for fixing a piezoelectric vibrator; and to provide the piezoelectric vibrator and a piezoelectric vibration gyroscope using the piezoelectric single crystal. <P>SOLUTION: The piezoelectric vibration gyroscope uses, as a piezoelectric vibrator, the piezoelectric single crystal obtained by adding nickel to lithium niobate in a range of &le;5 mol.%, and is obtained by attaching the piezoelectric vibrator to a substrate or the like by using a supporting mechanism. Changes of the electromechanical coupling factor k and the mechanical quality factor Qm caused by the supporting mechanism of the piezoelectric vibrator are reduced, and it becomes possible to miniaturize the piezoelectric vibrator and the piezoelectric vibration gyroscope and to improve the mass-productivity by adding nickel. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005231976(A) 申请公布日期 2005.09.02
申请号 JP20040046164 申请日期 2004.02.23
申请人 NEC TOKIN CORP 发明人 FUJIWARA CHIEKO;SASAKI ATSUSHI
分类号 G01P9/04;B06B1/06;C30B29/30;G01C19/56;H01L41/08;H01L41/09;H01L41/18;H03H9/17 主分类号 G01P9/04
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