| 发明名称 |
INTEGRATED CIRCUIT SYSTEM WITH CLEAN SURFACES |
| 摘要 |
An integrated circuit system includes providing an integrated circuit wafer; applying a first cleaning solution over the integrated circuit wafer; and applying a second cleaning solution over the integrated circuit wafer to prevent or remove a defect resulting from the first cleaning process.
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| 申请公布号 |
US2008069958(A1) |
申请公布日期 |
2008.03.20 |
| 申请号 |
US20070854972 |
申请日期 |
2007.09.13 |
| 申请人 |
CHARTERED SEMICONDUCTOR MANUFACTURING LTD. |
发明人 |
GOH YIN-MIN FELICIA;ISMAIL ZAINAB;TAN YONG SIANG;TAN LING ZHI;CHIEW SIN PING |
| 分类号 |
B05D3/10;B08B3/08 |
主分类号 |
B05D3/10 |
| 代理机构 |
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代理人 |
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| 主权项 |
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