| 摘要 |
A magazine fixing module and a semiconductor manufacturing apparatus using the same are provided to prevent the magazine from being damaged by clamping the magazine through a cylinder and an elastic member. A pedestal(110) supports a lower part of a magazine. A support part(120) is extended to a direction vertical to the pedestal and has an adhesion surface closely adhered to a side of the magazine. A clamping unit(130) is arranged in one side of the support part facing the pedestal and presses the magazine by moving up and down in an extension direction of the support part. A cylinder(140) is connected to the clamping unit and closely adheres the clamping unit to the magazine. A clamping controller includes an elastic member(150) connected to the clamping unit with the cylinder.
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