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发明名称
摘要
申请公布号
JP4414012(B2)
申请公布日期
2010.02.10
申请号
JP19990077166
申请日期
1999.03.23
申请人
发明人
分类号
C30B33/02;H01L21/322;C30B29/06
主分类号
C30B33/02
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代理人
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地址
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