| 摘要 |
An arrangement for handling a liquid metal for cooling revolving components of a plasma-based radiation source comprises a reservoir (221) of liquid metal (21) in a vessel (22), a tempering device (24) for adjusting the temperature moderately above the melting point of the metal (21), a pump unit (23) for circulating the liquid metal (21), wherein a handling unit (2) is provided for transporting the metal (21) into a separated source module (1) via a feed pipe (3) and a return pipe (4) for guiding highly heated metal (21) back from the source module (1) into the reservoir (221), wherein the return pipe (4) is formed as a straight pipe slightly inclined to the reservoir (221) to guide the heated metal (21) back by action of gravity in a substantially laminar flow. |
